Sensor Technology

MSRI is developing multi-species gas sensors in collaboration with the University of Utah. MSRI successfully demonstrated gas sensors with great selectivity for H2O and O2 by using lattice absorption behaviors of gas species in perovskite oxide materials. The microfabricated multi-species sensors using this novel sensing mechanism combined with the conventional adsorption allows more accurate detection of various gas species by eliminating the interference effects from humidity and oxygen.

Sensor Technology

High-Temperature SO2 Sensor

  • Compact and Lightweight Solid-State Electrochemical Sensor for Sulfur Oxide (SO2)
  • Highly selective for SO2
  • High-temperature applications

High-Temperature SO2 Sensor

High Temperature Gas Sensors

  • Micro-fabricated, Multi-species Integrated Gas Sensors
  • Sensing mechanism based on molecular absorption and adsorption
  • High selectivity gas sensor for O2 and H2O
  • High-temperature in situ measurement

High Temperature Gas Sensors

Thin Film Thermocouple for High Temperature

  • Thin film oxide thermocouple for measurement of extremely high temperature up to 2000°C (3632°F)

Thin Film Thermocouple for High Temperature